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With a wafer loading/unloading system,
this system measures the whole contents of a wafer
carrier automatically. |
*Dedicated software provides fully
automatic carrier-by-carrier measurements
* User-friendly GUI facilitates the selection of wafers
to be measured
* Wafer map facilitates the selection of chips to
be measured
* Industry-proven NWL860T wafer loader ensures reliable
wafer transport
* In combination with the VMR-3020 Z120X, it can measure
minuscule dimensions on wafers
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