Supports observation of wafers up to 300mm with large-sized stage
A stage capable of handling 300/200mmų wafers has been integrated with a robust microscope frame with excellent rigidity and high vibration resistance created through computer-aided structural analysis to enable this microscope to perfectly meet the need for inspection of wafers, which are being progressively increased in size.
* CF Infinity Corrected optical system
* Excellent rigidity throughout the microscope
* Outstanding ease of operation
* Complete anti-contamination design